Band filter using film bulk acoustic resonator and

专利名称：Band filter using film bulk acoustic

resonator and method of fabricating thesame

发明人：Seog-woo Hong,Byeong-ju Ha,In-sang

Song,Kyu-sik Kim

申请号：US11337574申请日：20060124公开号：US07658858B2公开日：20100209

专利附图：

摘要：A band filter using a film bulk acoustic resonator and a method of fabricating

the same. The method includes the steps of forming a membrane layer on a substrate,forming a plurality of resonators on an upper surface of the membrane layer, depositinga mask layer on a lower surface of the membrane layer and patterning the mask layer toform a plurality of main windows and sub windows, and forming cavities along the mainwindows in the substrate and forming sub walls in the cavities in such a way that the subwalls are separated apart from the membrane layer by using the notch effect causedduring a dry etching. It is possible to precisely form cavities with desired sizes even if thecavities have different sizes, to reduce the notched areas in the cavities, to reduce thetotal size of the filter by decreasing a distance between the cavities and to reduce thetotal length of wires.

申请人：Seog-woo Hong,Byeong-ju Ha,In-sang Song,Kyu-sik Kim

地址：Yongin-si KR,Seongnam-si KR,Seoul KR,Suwon-si KR

国籍：KR,KR,KR,KR

代理机构：Sughrue Mion, PLLC

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